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翻訳と辞書　辞書検索 [ 開発暫定版 ] スポンサード リンク Low-pressure discharge ： ウィキペディア英語版 Low-pressure discharge Low-pressure discharges are discharges made under gas pressures from a few millitorr to a little less than atmospheric. They have the benefit of less power requirement of sustenance of the discharge as volume-recombination rates are lower. It is easier to achieve uniform discharges at low pressure. Normally, the system is pumped down and only necessary plasma gases are then flown into the plasma chamber. Argon is a typical background gas because it has low ionization potential and therefore is easier to break down and sustain. Most discharges used in the semiconductor industry employ low-pressure plasmas. 抄文引用元・出典: フリー百科事典『 ウィキペディア（Wikipedia）』 ■ウィキペディアで「Low-pressure discharge」の詳細全文を読む スポンサード リンク 翻訳と辞書 : 翻訳のためのインターネットリソース Copyright(C) kotoba.ne.jp 1997-2016. All Rights Reserved.